Helping RF power supplies easily support multiple industrial communication protocols

RF power supplies play a vital role in semiconductor manufacturing. From plasma generation to etching processes and thin film deposition techniques, RF power ensures precision and high efficiency in device fabrication. With its high-performance communication and strong adaptability, EtherCAT has become a widely adopted industrial Ethernet protocol in the semiconductor industry.

As a result, EtherCAT technology is widely used in domestically produced thin-film deposition and etching equipment. Since RF power supplies are components within these machines, they need to be compatible with EtherCAT and ensure high-quality, stable communication even in demanding environments.

Challenges faced by the customer

• Changing market needs: The customer currently requires EtherCAT protocol support, but may need other protocols in the future, such as PROFIBUS DP or DeviceNet. How can they quickly adapt to changing requirements?
• Harsh operating environment: RF power supplies are used in semiconductor equipment, where high stability is critical. Any issue during production could result in significant losses.
• Limited R&D resources: The customer’s core strength lies in RF product development. They do not have the resources to invest in the complex development and maintenance of industrial communication protocols.

HMS solution
After comparing several products, the customer chose the Anybus CompactCom 40 Module (M40). In this setup, the RF power supply’s main control microcontroller unit (MCU) communicates with the Anybus CompactCom via Serial Peripheral Interface (SPI), and the Anybus CompactCom handles all protocol-related tasks.

With support from HMS’ local technical experts, the customer completed product development and had a prototype ready in just 25 days. As a result, the RF power supply now supports EtherCAT, DeviceNet, and PROFIBUS DP—three common communication protocols in the semiconductor industry.

Solution highlights

• Multi-protocol support: A single hardware design supports multiple industrial communication protocols.
• Flexible interfaces: Connects to the CPU via UART, SPI, or 8-/16-bit parallel interfaces.
• Easy development: Speeds up time-to-market.
• User-Friendly: Plug-in module design for easy installation.
• Pre-Certified: Pre-certified by relevant network organizations to simplify product certification.

EtherCAT Conformance in the Semiconductor Industry
In addition to developing high-end equipment, semiconductor equipment manufacturers must ensure that each automation device complies with the EtherCAT Semiconductor Device Profile specified by the EtherCAT Technology Group (ETG). Anybus CompactCom 40 supports this profile, both in hardware and software, and conforms to ETG.5003. This significantly reduces development and time-to-market.

Detailed solution reference:
https://mp.weixin.qq.com/s/JHgLEi713y68nigHbYxYlg[MC1] 

Impact of the Solution
The customer has been working with HMS since 2022. RF power supplies using the Anybus CompactCom have been successfully deployed in volume within the semiconductor industry. These products, ranging from a few kilowatts to several dozen kilowatts, have demonstrated stable performance in real-world applications and support EtherCAT, DeviceNet, and PROFIBUS DP protocols. The Anybus CompactCom has helped the customer establish a strong reputation for their RF power supplies in the semiconductor industry, with annual usage reaching over a thousand units.

For more information on Anybus embedded products, visit: www.hms-networks.com/embedded-network-solutions